China High quality Aluminium Silicon Sputtering Target Quotes, Factory, Manufacturers

Aluminium Silicon Sputtering Target

Brand :Xinkang

Product origin :Hunan,China

Delivery time :1-3 weeks

Supply capacity :1-2 tons / month

Aluminum Silicon Sputtering Targets are produced by melting technology, usually used for IC application. By adding small amount of silicon and copper metals, aluminium interconnects’ electromigration and diffusion to wafer can be improved effectively, and service life can be raised greatly. Aluminum Silicon Copper AlSiCu 98.5/1/0.5wt% Sputtering Targets are adopted for ULVAC, ANEALVA and Varian sputtering machines. With up to 4N purity, uniform grain size, lower oxygen content, end user can obtain constant erosion rates as well as high purity and homogeneous thin film coating during PVD process.



Chemical Composition: AlSi 99/1wt%, AlSiCu 98.5/1/0.5wt%, AlSi 90/10wt%, AlSi75/25wt%, AlSi50/50wt%, AlSi25/75wt%, other composition can be customized

Segregation of weight: +/-0.2wt%

Available Purity: 3N, 4N

Production Technology: melting

Shapes: planar targets

Average Grain Size: < 300um, structure of fine grains can be customized   


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